Kungani Izinhlelo Zokulethwa Kwegesi ze-UHP Zibaluleke Kangaka?
Ekwenziweni kwe-semiconductor—izinqubo ezifana nokusika, i-CVD, ukufakwa kwe-ion, kanye ne-lithography—amagesi enqubo kumele abe nobumsulwa obuphezulu kakhulu, ngokuvamile angu-99.9999% (6N) noma ngisho no-99.99999% (7N). Ngisho nezinto ezingcolisayo ezingeni le-ppb (izingxenye ngebhiliyoni) noma i-ppt (izingxenye nge-trillion)—njengomswakama noma i-oxygen—kungabangela ukukhubazeka okubulalayo njengokuncipha kwe-gate oxide, izikhala zensimbi, noma izifunda ezimfushane kuma-wafer, okungenzeka kulahleke yonke indawo.
Ngakho-ke, umsebenzi wohlelo lokulethwa kwegesi lwe-UHP ukuthutha amagesi avela emthonjeni aye ethuluzini lenqubo ngaphandle kokuwohloka kobumsulwa, ukuvimbela kokubili ukungcola nokuvuza kuzo zonke izindawo.
Kungani i-EP Tubing Iba Umgogodla Wezinhlelo ze-UHP?
Ipayipi le-EP (elekthropolished) lenziwe ngensimbi engagqwali edlula enkambisweni yokupholisha nge-electrochemical, iveza ubuso bangaphakathi obufana nesibuko. Lokhu kuyenza ibe “umthambo” obalulekile wokusatshalaliswa kwegesi ye-UHP.
Ukuhlanzeka Okuphelele - Ukuvimbela Emthonjeni
Ukucubungula i-EP kunciphisa ukujiya kobuso bangaphakathi (Ra) kube ngu-0.13 µm – 0.25 µm noma ngaphansi. Lokhu kuqeda okubushelelezi kakhulu kususa imifantu emincane kanye nezindawo zokumunca, kungashiyi ndawo yezinhlayiya, ama-ion ensimbi, noma umswakama okunamathelayo.
Ukumelana Nokugqwala Okuthuthukisiwe – Ukulondolozwa Kobumsulwa
Isinyathelo sokupholisha nge-electro sisusa ukungcola okungaphezulu komhlaba futhi sakha ungqimba olungenamsebenzi olucebile nge-chrome-oxide, oluthuthukisa kakhulu ukumelana namagesi agqwalisayo njenge-Cl₂, CF₄, kanye ne-HCl. Lokhu kuvimbela ukugqwala kodonga lwamapayipi okungadala izinhlayiya noma ukungcola kwegesi.
Ukusebenza Kahle Kokugeleza Okuthuthukisiwe Nokuhlanza Okusheshayo
Udonga lwangaphakathi olubushelelezi lunciphisa ukumelana nokugeleza futhi lusheshisa ukuhlanza uhlelo kanye nokushintsha igesi. Ezinqubweni ezidinga ukushintshwa kwegesi okusheshayo, lokhu kunciphisa izikhathi zomjikelezo futhi kukhulisa ukudlula komoya okuhle.
Izinto Eziphezulu – Izinga “Lomqhele”
Ishubhu le-EP elisezingeni eliphezulu lenziwe ngensimbi engagqwali engu-316L VIM-VAR (Vacuum Induction Melting + Vacuum Arc Remelting). Le nqubo yokuncibilika kabili iqinisekisa ubumsulwa obukhulu bensimbi eyisisekelo, okuyisidingo esiyisisekelo sokufeza ukusebenza okuphezulu kwe-EP.
Izimo Zokusebenza Eziyinhloko
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Izinqubo Eziyinhloko– Ukulethwa kwamagesi asabela ngobumsulwa obuphezulu ukuze kukhishwe, kufakwe i-CVD, kufakwe i-ion, kanye ne-lithography.
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Amagesi Akhethekile– Ukuphathwa ngokuphephile kwamagesi avuthayo, anobuthi, noma agqwalisayo njenge-SiH₄, PH₃, Cl₂, kanye ne-BCl₃. Kumagesi ayingozi kakhulu, kuvame ukusetshenziswa amapayipi e-EP aqukethe kabili (ipayipi langaphakathi legesi, ijazi langaphandle likhishwe noma lihlanzwe nge-nitrogen ukuze kuqashwe ukuvuza).
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Ihadiwe Ebalulekile– Kusetshenziswa kumaphaneli okusabalalisa igesi (ama-VMB), amakhabethe egesi, kanye nama-process tool hook lapho izindawo zangaphakathi ezihlanzekile kakhulu ziyadingeka khona.
Ngale Kwepayipi: Ezinye Izinto Ezibalulekile Zesistimu Ephelele Ye-UHP
Ukuqinisekisa ubuqotho obuphelele, uhlelo kumele futhi luhlanganise:
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Ukushisela Okujikelezayo Okuzenzakalelayo Ngokugcwele– Kwenziwa e-ISO Class 5 (Class 100) noma ezindaweni zokuhlanza ezingcono, kususa ukuhlukahluka kokushisela ngesandla kanye nezingozi zokungcola.
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Izinto Zokufaka Izisimbozo Zobuso Zensimbi Yonke– Njengezinhlobo ze-VCR® noma ze-W Seal, ezithembele kuma-gasket ensimbi ukuze zingavuzi lutho.
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Ukuhlanza Nokupakisha Okuqinile– Amapayipi e-EP avame ukuhlanzwa ngamanzi ahlanzekile kakhulu, omiswe, bese ehlanzwa nge-nitrogen ngaphambi kokuba afakwe emaphaketheni egumbi lokuhlanza ukuze kulondolozwe ubumsulwa bawo “njengoba buthunyelwe” kuze kube yilapho efakwa.
Ipayipi le-EP aliyona nje ipayipi—liyindlela yokuqala yokuzivikela ekulethweni kwegesi ye-semiconductor. Ubuso bayo obubushelelezi kakhulu, ukumelana nokugqwala okuphezulu, kanye nokuhlanzeka kwezinto ezibonakalayo okuphezulu kuthinta ngqo ukukhiqizwa kwe-wafer, ukuthembeka kwedivayisi, kanye nenzuzo ephelele. Ezweni lama-node angaphansi kwe-5nm kanye nesabelomali esiqinile sezinkinga, ipayipi le-EP aliyona into ongayikhetha—liyisisekelo.
Isikhathi sokuthunyelwe: Agasti-05-2026