1. Incazelo Yesistimu Yegesi Eningi:
Ukugcinwa kanye nokulawulwa kwengcindezi yamagesi angasebenzi Izinhlobo zamagesi: Amagesi angasebenzi ajwayelekile (i-nitrogen, i-argon, umoya ocindezelwe, njll.)
Usayizi wephayiphi: Kusukela ku-1/4 (iphayiphi yokuqapha) kuya kuphayiphi eliyinhloko elingamasentimitha angu-12
Imikhiqizo eyinhloko yalolu hlelo yile: i-diaphragm valve/i-bellows valve/i-ball valve, isixhumi esihlanzekile kakhulu (i-VCR, ifomu lokushisela), isixhumi se-ferrule, i-pressure regulating valve, i-pressure gauge, njll.
Njengamanje, uhlelo olusha luhlanganisa nohlelo lwegesi olukhethekile olusebenzisa amasilinda egesi aqinile noma amaloli amathangi okugcina nokuthutha.
2. Incazelo Yesistimu Yokuhlanzwa:
Ukususwa kokungcola okuvela kumagesi amakhulu ukuze kusetshenziswe amapayipi egesi ahlanzekile kakhulu
3. Incazelo Yamakhabethe Egesi:
Nikeza ukulawula ingcindezi kanye nokuqapha ukugeleza kwemithombo ekhethekile yegesi (amagesi anobuthi, avuthayo, asabelayo, aqothulayo), futhi unekhono lokufaka esikhundleni samasilinda egesi.
Indawo: Itholakala phansi kwe-Sub-fab noma phansi ukuze kugcinwe amagesi akhethekile Umthombo: NF3, SF6, WF6, njll.
Usayizi wephayiphi: Iphayiphi yegesi yangaphakathi, ngokuvamile ingamasentimitha angu-1/4 yephayiphi yenqubo, isentimitha engu-1/4-3/8 ikakhulukazi yephayiphi yokuhlanza i-nitrogen ehlanzekile kakhulu.
Imikhiqizo eyinhloko: Amavalvu e-diaphragm ahlanzekile kakhulu, amavalvu okuhlola, amageyiji okucindezela, amageyiji okucindezela, izixhumi zokuhlanza okuphezulu (i-VCR, ifomu lokushisela) Lawa makabhinethi egesi aqukethe amandla okushintsha ngokuzenzakalelayo amasilinda ukuqinisekisa ukuhlinzekwa kwegesi okuqhubekayo kanye nokufakwa esikhundleni kwamasilinda ngokuphephile.
4. Incazelo Yokusabalalisa:
Ukuxhuma umthombo wegesi kukhoyili yokuqoqwa kwegesi
Usayizi womugqa: Embonini yama-chip, usayizi wepayipi lokusabalalisa igesi ngobuningi ngokuvamile usukela ku-1/2 intshi kuya ku-2 intshi.
Ifomu lokuxhuma: Amapayipi egesi akhethekile ngokuvamile axhunywa ngokushisela, ngaphandle kokuxhumeka kwemishini noma ezinye izingxenye ezihambayo, ikakhulukazi ngoba uxhumano lokushisela lunokwethenjelwa okuqinile kokuvala.
Embonini yama-chip, kunezipayipi ezingamakhulu amakhilomitha ezixhunywe ekudluliseni igesi, ezingaba ngamafidi angu-20 ubude futhi zihlanganiswe ndawonye. Amanye ama-tubing bends kanye nokuxhumeka kwe-tube welding nakho kuvame kakhulu.
5. Ibhokisi lamavalvu elinomsebenzi omningi (Ibhokisi Le-Valve Manifold, VMB) Incazelo:
Kuwukusabalalisa amagesi akhethekile avela emthonjeni wegesi aye emikhawulweni yemishini ehlukene.
Usayizi wepayipi langaphakathi: ipayipi lenqubo elingu-1/4 intshi, kanye nepayipi lokuhlanza elingu-1/4 - 3/8 intshi. Uhlelo lungasebenzisa ukulawula kwekhompyutha ukuze ludinge amavalvu asebenzayo noma izimo zezindleko eziphansi ngamavalvu esandla.
Imikhiqizo yesistimu: ama-valve/ama-bellows e-diaphragm ahlanzekile kakhulu, ama-valve okuhlola, ama-joints ahlanzekile kakhulu (i-VCR, ifomu lokushisela elincane), ama-valve okulawula ingcindezi, ama-pressure gauges nama-pressure gauges, njll. Ukuze kusatshalaliswe amagesi athile angasebenzi, i-Valve Manifold Panel - VMP (i-multi-function valve disc) isetshenziswa kakhulu, enendawo evulekile yediski yegesi futhi ayidingi ukwakheka kwesikhala esivaliwe kanye nokuhlanza okwengeziwe kwe-nitrogen.
6. Ipuleti/ibhokisi le-valve yesibili (Iphaneli Yokuxhuma Amathuluzi) Incazelo:
Xhuma igesi edingwa yimishini ye-semiconductor kusukela emthonjeni wegesi kuya ekugcineni kwemishini bese unikeza ukulawulwa kwengcindezi okuhambisanayo. Leli phaneli liyisistimu yokulawula igesi eseduze nokuphela kwemishini kune-VMB (ibhokisi le-valve elinomsebenzi omningi).
Usayizi wepayipi legesi: 1/4 - 3/8 intshi
Usayizi wepayipi loketshezi: 1/2 - 1 intshi
Usayizi wepayipi lokukhipha: 1/2 - 1 intshi
Imikhiqizo eyinhloko: ivalvu ye-diaphragm/i-bellows, ivalvu yendlela eyodwa, ivalvu yokulawula ingcindezi, i-pressure gauge, i-pressure gauge, i-high-purity joint (i-VCR, i-micro-welding), i-ferrule joint, i-ball valve, i-hose, njll.
Isikhathi sokuthunyelwe: Novemba-22-2024