I-909 Project Very Scale Integrated Circuit Factory iwumklamo omkhulu wokwakha wemboni yezogesi yezwe lami phakathi NoHlelo Lweminyaka Eyisishiyagalolunye Lweminyaka Emihlanu ukukhiqiza ama-chips anobubanzi bomugqa wama-microns angu-0.18 kanye nobubanzi obungama-200 mm.
Ubuchwepheshe bokukhiqiza amasekhethi ahlanganisiwe amakhulu kakhulu akubandakanyi nje kuphela ubuchwepheshe obunembayo obufana ne-micro-machining, kodwa futhi bubeka izidingo eziphezulu ekuhlanzekeni kwegesi.
Ukuhlinzekwa kwegesi ngobuningi be-Project 909 kunikezwa ibhizinisi elihlanganyelwe phakathi kwe-Praxair Utility Gas Co., Ltd. yase-United States kanye nezinhlaka ezifanele e-Shanghai ukuze kusungulwe ngokuhlanganyela indawo yokukhiqiza igesi. Imboni yokukhiqiza igesi iseduze nemboni yephrojekthi ye-909 isakhiwo, esihlanganisa indawo elinganiselwa ku-15,000 square metres. Izidingo zokuhlanzeka nokuphuma kwamagesi ahlukahlukene
I-High-purity nitrogen (PN2), i-nitrogen (N2), ne-high-purity oxygen (PO2) ikhiqizwa ngokuhlukana komoya. I-high-purity hydrogen (PH2) ikhiqizwa nge-electrolysis. I-Argon (Ar) ne-helium (He) ithengwa ngaphandle. I-quasi-gas iyahlanzwa futhi ihlungwe ukuze isetshenziswe ku-Project 909. Igesi ekhethekile inikezwa ngamabhodlela, futhi ikhabhinethi yamabhodlela egesi itholakala ku-workshop yokusiza ye-integrated circuit production plant.
Amanye amagesi ahlanganisa nesistimu ye-CDA yomoya ohlanzekile owomile ocindezelwe, enomthamo wokusetshenziswa ongu-4185m3/h, indawo yokucindezela yamazolo engu-70°C, kanye nosayizi wezinhlayiyana ongekho ngaphezu kuka-0.01um egesi lapho osetshenziswa khona. Uhlelo lokuphefumula komoya ocindezelwe (BA), ivolumu yokusetshenziswa engu-90m3/h, indawo yokucindezela amazolo engu-2 ℃, usayizi wezinhlayiyana egesi lapho usetshenziswa khona awukho mkhulu kuno-0.3um, uhlelo lwe-process vacuum (PV), ivolumu yokusetshenziswa engu-582m3/h, i-vacuum degree endaweni yokusetshenziswa -79993Pa. Uhlelo lokuhlanza i-vacuum (HV), ivolumu yokusetshenziswa engu-1440m3/h, i-vacuum degree endaweni yokusetshenziswa -59995 Pa. Igumbi le-compressor yomoya kanye negumbi lepompo le-vacuum kokubili kutholakala endaweni yefektri yephrojekthi engu-909.
Ukukhethwa kwezinto zamapayipi kanye nezesekeli
Igesi esetshenziswa ekukhiqizeni i-VLSI inezidingo zokuhlanzeka eziphakeme kakhulu.Amapayipi egesi ahlanzekilezivame ukusetshenziswa ezindaweni zokukhiqiza ezihlanzekile, futhi ukulawulwa kwazo kwenhlanzeko kufanele kuhambisane noma kube phezulu kunezinga lokuhlanzeka kwendawo esetshenziswayo! Ngaphezu kwalokho, amapayipi egesi ahlanzekile avame ukusetshenziswa ezindaweni ezihlanzekile zokukhiqiza. I-hydrogen ehlanzekile (PH2), i-oxygen ehlanzekile (i-PO2) namanye amagesi akhethekile ayakwazi ukuvutha, aqhume, asekele ukusha noma amagesi anobuthi. Uma uhlelo lwepayipi yegesi luklanywe ngendlela engafanele noma izinto ezikhethiwe ngendlela engafanele, ngeke nje ukuhlanzeka kwegesi esetshenziswe endaweni yegesi kunciphe, kodwa futhi kuzohluleka. Ihlangabezana nezidingo zenqubo, kodwa ayiphephile ukuyisebenzisa futhi izodala ukungcoliswa kwefekthri ehlanzekile, kuthinte ukuphepha nokuhlanzeka kwefekthri ehlanzekile.
Isiqinisekiso sekhwalithi yegesi ehlanzekile kakhulu endaweni yokusetshenziswa akuxhomeki kuphela ekunembeni kokukhiqizwa kwegesi, imishini yokuhlanza kanye nezihlungi, kodwa futhi kuthinteka kakhulu ngezici eziningi ohlelweni lwamapayipi. Uma sithembela ezintweni zokukhiqiza igesi, okokuhlanzwa kanye nezihlungi Kumane akulungile ukubeka izidingo ezinembayo eziphakeme kakhulu ukunxephezela ukwakheka okungafanele kwesistimu yamapayipi egesi noma ukukhethwa kwezinto.
Phakathi nenqubo yokuklama iphrojekthi ye-909, silandele “Ikhodi Yokuklanywa Kwezitshalo Ezihlanzekile” GBJ73-84 (izinga lamanje lithi (GB50073-2001)), “Ikhodi Yokuklanywa Kweziteshi Zomoya Ezicindezelwe” GBJ29-90, “Ikhodi Okokuklanywa Kweziteshi Zomoya-mpilo” GB50030-91 , “Ikhodi Yokuklanywa Kweziteshi Ze-Hydrogen Ne-Oxygen” GB50177-93, kanye nezinyathelo zobuchwepheshe ezifanele zokukhethwa kwezinto ezisetshenziswayo zamapayipi nezinye izinto. “Ikhodi Yokuklanywa Kwezitshalo Ezihlanzekile” ibeka ukukhethwa kwezinto zamapayipi namavalvu kanje:
(1) Uma ubumsulwa begesi bungaphezu noma bulingana no-99.999% futhi indawo yamazolo ingaphansi kuka -76°C, 00Cr17Ni12Mo2Ti ipayipi lensimbi engagqwali ene-carbon low-carbon (316L) enodonga lwangaphakathi olupholishwe ngogesi noma i-OCr18Ni9 ipayipi lensimbi engagqwali (304) Udonga lwangaphakathi lwe-electropolished kufanele lusetshenziswe. I-valve kufanele ibe yi-valve ye-diaphragm noma i-valve ye-bellows.
(2) Uma ubumsulwa begesi bungaphezu noma bulingana no-99.99% futhi indawo yamazolo ingaphansi kuka -60°C, kufanele kusetshenziswe ishubhu lensimbi engagqwali i-OCr18Ni9 (304) enodonga lwangaphakathi olupholishelwe ngogesi. Ngaphandle kwamavalvu okuvuthela okufanele asetshenziselwe amapayipi egesi avuthayo, amavalvu amabhola kufanele asetshenziselwe amanye amapayipi egesi.
(3) Uma indawo yamazolo yomoya ocindezelwe owomile ingaphansi kuka -70°C, ipayipi lensimbi engagqwali i-OCr18Ni9 (304) enodonga lwangaphakathi olupholishiwe kufanele kusetshenziswe. Uma indawo yamazolo ingaphansi kuka -40 ℃, ipayipi lensimbi engagqwali i-OCr18Ni9 (304) noma ipayipi lensimbi elingenamthungo elidiphu elishisayo kufanele lisetshenziswe. I-valve kufanele ibe i-valve ye-bellows noma i-valve yebhola.
(4) Impahla yevalvu kufanele ihambisane nempahla yepayipi yokuxhuma.
Ngokwezidingo zokucaciswa kanye nezinyathelo zobuchwepheshe ezifanele, sibheka ikakhulukazi izici ezilandelayo lapho sikhetha izinto zamapayipi:
(1) Ukungena komoya kwezinto zamapayipi kufanele kube kuncane. Amapayipi ezinto ezahlukene anokungena komoya okuhlukile. Uma amapayipi anomoya omkhulu wokungena ekhethiwe, ukungcola akukwazi ukususwa. Amapayipi ensimbi engagqwali namapayipi ethusi angcono ekuvimbeleni ukungena nokugqwala komoyampilo emkhathini. Nokho, njengoba amapayipi ensimbi engagqwali engasebenzi kakhulu kunamapayipi ethusi, amapayipi ethusi asebenza kakhulu ekuvumeleni umswakama osemkhathini ukuba ungene ezindaweni zawo ezingaphakathi. Ngakho-ke, lapho ukhetha amapayipi amapayipi egesi ahlanzekile, amapayipi ensimbi engagqwali kufanele abe yisinqumo sokuqala.
(2) Indawo yangaphakathi yezinto zepayipi i-adsorbed futhi inomthelela omncane ekuhlaziyeni igesi. Ngemva kokuba ipayipi lensimbi engagqwali licutshungulwe, inani elithile legesi lizogcinwa ku-lattice yayo yensimbi. Lapho igesi ehlanzekile kakhulu idlula, le ngxenye yegesi izongena ekugelezeni komoya futhi ibangele ukungcola. Ngesikhathi esifanayo, ngenxa ye-adsorption nokuhlaziywa, insimbi endaweni yangaphakathi yepayipi izophinde ikhiqize inani elithile le-powder, okubangela ukungcoliswa kwegesi eliphezulu. Kuzinhlelo zamapayipi anobumsulwa obungaphezulu kuka-99.999% noma ileveli ye-ppb, 00Cr17Ni12Mo2Ti ipayipi lensimbi engagqwali ephansi ye-carbon (316L) kufanele isetshenziswe.
(3) Ukumelana nokuguga kwamapayipi ensimbi engagqwali kungcono kunamapayipi ethusi, futhi uthuli lwensimbi olukhiqizwa ukuguguleka kokugeleza komoya luncane uma kuqhathaniswa. Amashabhu okukhiqiza anezidingo eziphakeme zokuhlanzeka angasebenzisa amapayipi ensimbi engagqwali engu-00Cr17Ni12Mo2Ti (316L) noma i-OCr18Ni9 yensimbi engagqwali (304), amapayipi ethusi akufanele asetshenziswe.
(4) Ezinhlelweni zamapayipi anegesi ehlanzekile engaphezu kuka-99.999% noma amazinga e-ppb noma ama-ppt, noma emakamelweni ahlanzekile anamazinga okuhlanzeka komoya ka-N1-N6 ashiwo “Kwikhodi Yedizayini Yefektri Ehlanzekile”, amapayipi ahlanzeke kakhulu nomaAmapayipi ahlanzekile kakhulu e-EPkufanele isetshenziswe. Hlanza “ishubhu elihlanzekile elinendawo yangaphakathi ebushelelezi”.
(5) Ezinye zezinhlelo ezikhethekile zamapayipi egesi asetshenziswa ekukhiqizeni amagesi agqwala kakhulu. Amapayipi akulezi zinhlelo zamapayipi kufanele asebenzise amapayipi ensimbi engagqwali angagqwali njengamapayipi. Uma kungenjalo, amapayipi azolimala ngenxa yokugqwala. Uma kwenzeka ukugqwala endaweni, amapayipi ensimbi angenamthungo ajwayelekile noma amapayipi ensimbi ashiselwe uthayela akufanele asetshenziswe.
(6) Empeleni, konke ukuxhunywa kwamapayipi egesi kufanele kushiselwe. Njengoba ukushiselwa kwamapayipi ensimbi kuzocekela phansi ungqimba, amapayipi ensimbi awasetshenziselwa amapayipi emakamelweni ahlanzekile.
Uma kucatshangelwa lezi zinto ezingenhla, amapayipi egesi namavalvu akhethiwe kuphrojekthi ka-&7& ami kanje:
Amapayipi esistimu ye-nitrogen (PN2) ehlanzekile kakhulu enziwe ngamapayipi ensimbi engenakhabhoni ephansi engu-00Cr17Ni12Mo2Ti (316L) anezindonga zangaphakathi ezipholishelwe ngogesi, futhi amavalvu enziwe ngamavalvu ensimbi engagqwali ento efanayo.
Amapayipi esistimu ye-nitrogen (N2) enziwe ngamapayipi ensimbi engagqwali angu-00Cr17Ni12Mo2Ti (316L) anezindonga zangaphakathi ezipholishelwe ngogesi, futhi amavalvu enziwe ngamavalvu ensimbi engagqwali ento efanayo.
Amapayipi esistimu e-hydrogen (PH2) ehlanzekile kakhulu enziwe ngamapayipi ensimbi engenakhabhoni ephansi engu-00Cr17Ni12Mo2Ti (316L) anezindonga zangaphakathi ezipholishelwe ngogesi, futhi amavalvu enziwe ngamavalvu ensimbi engagqwali ento efanayo.
Amapayipi esistimu ye-oksijeni (PO2) ehlanzekile kakhulu enziwe ngamapayipi ensimbi engenakhabhoni ephansi engu-00Cr17Ni12Mo2Ti (316L) anezindonga zangaphakathi ezipholishwe ngogesi, futhi amavalvu enziwe ngamavalvu ensimbi engagqwali ento efanayo.
Amapayipi esistimu ye-Argon (Ar) enziwe ngamapayipi ensimbi engenakhabhoni ephansi engu-00Cr17Ni12Mo2Ti (316L) anezindonga zangaphakathi ezipholishelwe ngogesi, kanye namavalvu ensimbi engagqwali ensimbi efanayo asetshenziswa.
Amapayipi esistimu ye-helium (He) enziwe ngamapayipi angu-00Cr17Ni12Mo2Ti ensimbi engagqwali enekhabhoni ephansi (316L) anezindonga zangaphakathi ezipholishelwe ngogesi, futhi amavalvu enziwe ngama-valve ensimbi engagqwali ento efanayo.
Amapayipi esistimu yomoya onomfutho owomile ohlanzekile (CDA) enziwe ngamapayipi ensimbi engagqwali e-OCr18Ni9 (304) anezindonga zangaphakathi ezipholishiwe, futhi ama-valve enziwe ngama-valve ensimbi engagqwali ento efanayo.
Amapayipi omoya ocindezelwe okuphefumulayo (BA) enziwe ngamapayipi ensimbi engagqwali e-OCr18Ni9 (304) anezindonga zangaphakathi ezipholishiwe, futhi ama-valve enziwe ngama-valve ebhola ensimbi engagqwali wento efanayo.
Amapayipi esistimu ye-vacuum (PV) enziwe ngamapayipi e-UPVC, futhi ama-valve enziwe ngama-vacuum butterfly valves enziwe ngento efanayo.
Amapayipi esistimu yokuhlanza (HV) enziwe ngamapayipi e-UPVC, futhi ama-valve enziwe ngama-vacuum butterfly valves enziwe ngento efanayo.
Amapayipi ohlelo lwegesi olukhethekile wonke enziwe ngamapayipi ensimbi engagqwali angu-00Cr17Ni12Mo2Ti (316L) anezindonga zangaphakathi ezipholishelwe ngogesi, futhi amavalvu enziwe ngamavalvu ensimbi engagqwali ento efanayo.
3 Ukwakhiwa nokufakwa kwamapayipi
3.1 Isigaba 8.3 “Sekhodi Yokuklama Isakhiwo Sefekthri Ehlanzekile” sibeka izinhlinzeko ezilandelayo zokuxhunywa kwamapayipi:
(1) Ukuxhunywa kwamapayipi kufanele kushiselwe, kodwa amapayipi ensimbi anama-dip ashisayo kufanele afakwe intambo.
(2) Amapayipi ensimbi engagqwali kufanele axhunywe nge-argon arc welding kanye ne-butt welding noma i-socket welding, kodwa amapayipi egesi ahlanzeke kakhulu kufanele axhunywe ngokushisela izinqe ngaphandle kwezimpawu odongeni lwangaphakathi.
(3) Ukuxhuma phakathi kwamapayipi nezinto zokusebenza kufanele kuhambisane nezidingo zokuxhunywa kwempahla.Uma usebenzisa ukuxhunywa kwepayipi, amapayipi ensimbi kufanele asetshenziswe.
(4) Ukuxhumana phakathi kwamapayipi namavalvu kufanele kuhambisane nemithethonqubo elandelayo
① Izinto zokuvala ezixhuma amapayipi egesi ahlanzeke kakhulu namavalvu kufanele asebenzise ama-gasket ensimbi noma ama-ferrules akabili ngokuya ngezidingo zenqubo yokukhiqiza nezici zegesi.
②Into yokuvala ekuxhumekeni kwentambo noma ye-flange kufanele kube i-polytetrafluoroethylene.
3.2 Ngokwezidingo zokucaciswa kanye nezinyathelo zobuchwepheshe ezifanele, ukuxhunywa kwamapayipi egesi ahlanzekile kufanele kufakwe i-welded ngangokunokwenzeka. Ukushisela izinqe eziqondile kufanele kugwenywe ngesikhathi sokushisela. Kufanele kusetshenziswe imikhono yamapayipi noma amalunga aqediwe. Imikhono yamapayipi kufanele yenziwe ngezinto ezifanayo kanye nokushelela kwangaphakathi kwangaphakathi njengamapayipi. izinga, ngesikhathi se-welding, ukuze kuvinjwe i-oxidation yengxenye ye-welding, igesi ehlanzekile yokuzivikela kufanele ifakwe kwipayipi yokushisela. Kumapayipi ensimbi engagqwali, i-argon arc welding kufanele isetshenziswe, futhi i-argon gas yobumsulwa obufanayo kufanele ifakwe kwipayipi. Kufanele kusetshenziswe ukuxhumana okunentambo noma okunentambo. Lapho uxhuma ama-flange, ama-ferrules kufanele asetshenziselwe ukuxhumana okufakwe imicu. Ngaphandle kwamapayipi oksijini namapayipi e-hydrogen, okufanele asebenzise ama-gaskets ensimbi, amanye amapayipi kufanele asebenzise ama-polytetrafluoroethylene gaskets. Ukusebenzisa inani elincane lerabha ye-silicone kuma-gaskets nakho kuzosebenza kahle. Thuthukisa umphumela wokuvala. Izinyathelo ezifanayo kufanele zithathwe lapho ukuxhumeka kwe-flange kwenziwa.
Ngaphambi kokuba umsebenzi wokufaka uqale, ukuhlolwa okubonakalayo okunemininingwane kwamapayipi,okokufaka, ama-valve, njll. kumele kwenziwe. Udonga lwangaphakathi lwamapayipi ensimbi engenasici kufanele lufakwe emanzini ngaphambi kokufakwa. Amapayipi, okokufakwayo, ama-valve, njll. wamapayipi omoya-mpilo kufanele kwenqatshelwe ngokuqinile kuwoyela, futhi kufanele akhishwe ngokuqinile ngokwezidingo ezifanele ngaphambi kokufakwa.
Ngaphambi kokuthi uhlelo lufakwe futhi lusetshenziswe, isistimu yamapayipi okudlulisa nokusabalalisa kufanele ihlanzwe ngokuphelele ngegesi ehlanzekile ekhululiwe. Lokhu akugcini nje ngokuphephula izinhlayiya zothuli eziwele ngephutha ohlelweni ngesikhathi sokufakwa, kodwa futhi kunendima yokomisa ohlelweni lwamapayipi, ukususa ingxenye yegesi equkethe umswakama emuncwa udonga lwamapayipi ngisho nempahla yamapayipi.
4. Ukuhlolwa kwengcindezi yepayipi nokwamukelwa
(1) Ngemva kokufakwa kwesistimu, ukuhlolwa kwe-radiographic okungu-100% kwamapayipi athutha uketshezi olunobuthi kakhulu kumapayipi egesi akhethekile kuyokwenziwa, futhi izinga lawo akumele libe ngaphansi kweZinga II. Amanye amapayipi kufanele ahlolwe ngamasampula nge-radiographic, futhi isilinganiso sokuhlolwa kwesampula akufanele sibe ngaphansi kuka-5 %, izinga akufanele libe ngaphansi kwebanga lesi-III.
(2) Ngemva kokudlula ukuhlolwa okungonakalisi, ukuhlolwa kokucindezela kufanele kwenziwe. Ukuze uqinisekise ukoma nokuhlanzeka kwesistimu yamapayipi, ukuhlolwa kwengcindezi ye-hydraulic akufanele kwenziwe, kodwa ukuhlolwa kwengcindezi yomoya kufanele kusetshenziswe. Ukuhlolwa kwengcindezi yomoya kufanele kwenziwe kusetshenziswa i-nitrogen noma umoya ocindezelwe ohambisana nezinga lokuhlanzeka kwegumbi elihlanzekile. Ingcindezi yokuhlola yepayipi kufanele ibe izikhathi ezingu-1.15 kunokucindezela kokuklama, futhi ingcindezi yokuhlola yepayipi lepayipi kufanele ibe ngu-0.2MPa. Ngesikhathi sokuhlolwa, ukucindezela kufanele kukhuphuke kancane kancane futhi kancane kancane. Lapho ingcindezi ikhuphukela ku-50% wengcindezi yokuhlola, uma kungekho okungavamile noma ukuvuza okutholakalayo, qhubeka nokwandisa isinyathelo ngesinyathelo ngesinyathelo ngo-10% wengcindezi yokuhlola, futhi uzinze ingcindezi imizuzu engu-3 ezingeni ngalinye kuze kufike ukucindezela kokuhlolwa. . Ukuzinzisa ukucindezela kwemizuzu ye-10, bese unciphisa ingcindezi ekucindezelweni kokuklama. Isikhathi sokumisa ingcindezi kufanele sinqunywe ngokuya ngezidingo zokutholwa kokuvuza. I-ejenti ekhipha amagwebu ifanelekile uma kungekho ukuvuza.
(3) Ngemuva kokuthi uhlelo lwe-vacuum luphumelele ukuhlolwa kwengcindezi, kufanele futhi luqhube ukuhlolwa kwe-vacuum degree yamahora angu-24 ngokusho kwemibhalo yokuklama, futhi izinga lokucindezela akufanele libe ngaphezu kuka-5%.
(4) Ukuhlolwa kokuvuza. Kuzinhlelo zamapayipi ebanga le-ppb ne-ppt, ngokuya ngezichasiselo ezifanele, akukho ukuvuza okufanele kubhekwe njengokufanelekile, kodwa ukuhlolwa kwenani elivuzayo kusetshenziswa phakathi nomklamo, okungukuthi, ukuhlolwa kwenani lokuvuza kwenziwa ngemva kokuhlolwa kokuqina komoya. Ingcindezi iyingcindezi yokusebenza, futhi ingcindezi iyamiswa amahora angama-24. Ukuvuza okumaphakathi kwehora kungaphansi noma kulingana no-50ppm njengoba kufanele. Isibalo sokuvuza simi kanje:
A=(1-P2T1/P1T2)*100/T
Kufomula:
Ukuvuza kwehora (%)
I-P1-Absolute pressure ekuqaleni kokuhlolwa (Pa)
I-P2-Absolute pressure ekupheleni kokuhlolwa (Pa)
I-T1-izinga lokushisa eliphelele ekuqaleni kokuhlolwa (K)
I-T2-izinga lokushisa eliphelele ekupheleni kokuhlolwa (K)
Isikhathi sokuthumela: Dec-12-2023